JPH0460551U - - Google Patents
Info
- Publication number
- JPH0460551U JPH0460551U JP10240690U JP10240690U JPH0460551U JP H0460551 U JPH0460551 U JP H0460551U JP 10240690 U JP10240690 U JP 10240690U JP 10240690 U JP10240690 U JP 10240690U JP H0460551 U JPH0460551 U JP H0460551U
- Authority
- JP
- Japan
- Prior art keywords
- forming apparatus
- film forming
- vacuum film
- holder
- heaters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 230000007423 decrease Effects 0.000 claims 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10240690U JPH0460551U (en]) | 1990-09-28 | 1990-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10240690U JPH0460551U (en]) | 1990-09-28 | 1990-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0460551U true JPH0460551U (en]) | 1992-05-25 |
Family
ID=31846635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10240690U Pending JPH0460551U (en]) | 1990-09-28 | 1990-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0460551U (en]) |
-
1990
- 1990-09-28 JP JP10240690U patent/JPH0460551U/ja active Pending
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